About: http://webisa.webdatacommons.org/360526060

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, in view of the foregoing, there is a need for a method for making high speed interconnect structures that incorporate air-gaps, however, without having the problems associated with conductive via misalignment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com