About: http://webisa.webdatacommons.org/3605314

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As noted above, a pre-inspection setup sequence may be used to evaluate characteristics, such as saturation, of a wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com