About: http://webisa.webdatacommons.org/360778694

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Vacuum is developed in the reaction chamber to 10-6 torr or less and gaseous mixture of GeF4 and silane, which is expressed as Sin H2n+2 where n is an integer between 1 and 3, is introduced into the reaction chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com