About: http://webisa.webdatacommons.org/361012503

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the invention, the foregoing and other advantages are obtained in part by a method of manufacturing a semiconductor device, comprising the sequential steps of:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com