About: http://webisa.webdatacommons.org/361103428

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Among these approaches, ion beam sputtering and MBE are especially attractive, because the deposition rates for these approaches can be more closely controlled through monitoring with a negative feedback loop.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au