About: http://webisa.webdatacommons.org/3614822

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A semiconductor device as claimed in claim 2, 3 or 14, wherein said first metal film comprises a material mainly comprising one selected from Ta, Nb, Hf, Ti and Cr, or an alloy containing these elements.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com