About: http://webisa.webdatacommons.org/361517830

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The indentations, also called "shallow depressions" in platen 101 are deep enough to allow a semiconductor wafer or other workpiece to be held for polishing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com