About: http://webisa.webdatacommons.org/361540407

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The pressure of the chamber is 30 to 300 Pa for example during deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com