| http://www.w3.org/ns/prov#value | - The reactor of claim 11, wherein the gas jet comprises a gas selected from the group consisting of H.sub.2, Ar, Ne, He, SiH.sub.4, N.sub.2, NH.sub.3, N.sub.2 H.sub.4, OH.sub.2, H.sub.2 S, C.sub.n H.sub.2n+2 , wherein n is an integer between
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