About: http://webisa.webdatacommons.org/361862054

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as recited in claim 1 wherein said substrate is a semiconductor wafer and said field is coextensive with an entire area of one side of said wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com