About: http://webisa.webdatacommons.org/36188754

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, a substrate containing mainly silicon, a metallic substrate, or a stainless substrate on the surface of which an insulating film is formed may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com