About: http://webisa.webdatacommons.org/362104933

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This method inadequate to form semiconductor devices with high production yield because the doping is carried out through the material such as silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com