| http://www.w3.org/ns/prov#value | - The conductive film 4 may be formed of a metal such as Pd, Pt, Ru, Ag, or Au, an oxide such as PdO, SnO2, or In2O3, a boride such as HfB2, a carbide such as TiC or SiC, a nitride such as TiN, or a semiconductor such as Si or Ge by ink jet coating, spin coating, dipping, vacuum evaporation, sputtering, or other techniques.
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