| http://www.w3.org/ns/prov#value | - The thickness irregularity of the surface is ???50 ??m or less, with an Rmax of 0.2 ??m or less; preferably ???25 ??m or less, with an Rmax of 0.1 ??m or less; and particularly preferably ???20 ??m or less, with an Rmax of 0.08 ??m or less.
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