About: http://webisa.webdatacommons.org/362261771

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The tool can be used for planarization or for damascene polishing of silicon oxide, silicon nitride, polysilicon, copper, tungsten, and other various metals.
http://www.w3.org/ns/prov#wasQuotedFrom	cornell.edu