| http://www.w3.org/ns/prov#value | - The surface including the trenches can have a rectangular, trapezoidal, oval, or convex hull profile. ?? can be in a range from about 150 nm to about 5,000 nm (e.g., from about 400 nm to about 700 nm, from about 1,200 nm to about 1,700 nm).
|
