About: http://webisa.webdatacommons.org/362625095

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, embodiments of the present invention for processing a substrate with a glow discharge plasma may include variables such as plasma potential, ion energy, ion density, heat flux, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es