| http://www.w3.org/ns/prov#value | - For example, refractory metals such as Mo, Ta, Wo, Cr, Nb, V, Zr, Tc, Ru, Rh, Hf, Ir, Os or Re and metallic Si are very hard to purify, and refractory metal silicide sputtering target plate such as MoSi2, TaSi2 with a higher purities than 99.99% are much harder to be prepared.
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