About: http://webisa.webdatacommons.org/36287969

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIGS. 2A-2F, a preferred method of forming an air gap or region between two conductive regions or elements, such as metal lines, is diagrammatically illustrated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca