| http://www.w3.org/ns/prov#value | - For example, the method of the present invention can be used to fabricate features having an average width of not greater than about 100 ??m, more preferably not greater than about 75 ??m, even more preferably not greater than 50 ??m and even more preferably not greater than 25 ??m, such as not greater than about 10 ??m and even not greater than about 5 ??m.
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