About: http://webisa.webdatacommons.org/363169174

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, the wafers may be rotated to position specific detected defects at a given position, such as the 12 o'clock position to facilitate further inspection of these defects.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es