About: http://webisa.webdatacommons.org/363415137

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Fabricating contacts according to the present invention achieves a fast, reliable, and uniform plating of differing features in a semiconductor device, especially low surface potential areas such as contact holes and other openings.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com