About: http://webisa.webdatacommons.org/36388192

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A top ring member 5 is disposed above the turntable 1 for holding an object to be polished, such as a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr