About: http://webisa.webdatacommons.org/364073995

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 4 and 5 show examples of fabrication to produce fine structures 30, 40 by arranging the micro-particles in a two-dimensional periodic pattern on the fabrication surface of target object materials 31, 41.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com