About: http://webisa.webdatacommons.org/364438138

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, or alternatively, contamination may degrade or render the MEMS device inoperative, particularly where the MEMS device is an optical device such as a micro-mirror.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr