About: http://webisa.webdatacommons.org/364648655

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To address the above-mentioned problems and others, the present invention is a method for compensating for long range variations such as flare in a layer of an integrated circuit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr