About: http://webisa.webdatacommons.org/364859497

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in the U-trench isolation region which is buried with the polysilicon film, regardless of the the structure and formation of the field insulating film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com