About: http://webisa.webdatacommons.org/36491940

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Stop layers and capping layers (where used) are of materials such as silicon nitride (SixNx) or silicon oxynitride (SiON).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com