About: http://webisa.webdatacommons.org/364972350

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, for MEMs and other applications, the tunability of the stress in our films from tensile to compressive over a very narrow temperature range (i.e., from about 100.degree.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com