About: http://webisa.webdatacommons.org/365493787

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is a schematical cross section of the processing chamber of FIG. 8 showing the interrelationship between the electrical potentials of the structures according to the invention and emphasizing other features.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com