About: http://webisa.webdatacommons.org/365689010

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Similarly to the embodiment 5, processing shown in FIGS. 25 to 27 is performed, and then, as shown in FIG. 31, resist mask 13 is formed over the regions other than the region for forming the memory cell transistor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com