About: http://webisa.webdatacommons.org/36579034

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic illustration of the overall semiconductor processing system including the load locks, the processing modules, the internal and external wafer transfer modules, and the wafer storage modules.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com