About: http://webisa.webdatacommons.org/365849638

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a somewhat schematic plan view of a conventional substrate processing tool 11 of the type which is used to apply semiconductor manufacturing processes to substrates such as silicon wafers or glass plates.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com