About: http://webisa.webdatacommons.org/365966580

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, in some embodiments, an oxygen source such as N2O or CO2 can be used instead of O2 and a silicon source other than monosilane may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com