About: http://webisa.webdatacommons.org/36598148

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph illustrates sheet resistances of conductive structures including the tungsten silicide films in FIGS. 6A to 6D.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com