About: http://webisa.webdatacommons.org/366009229

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Planarization or polishing is a process in which material is removed from the surface of the substrate to form a generally even, planar surface.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com