About: http://webisa.webdatacommons.org/366027197

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A semiconductor device according to claim 21, wherein said second insulating film is a silicon oxide film, said third insulating film is a silicon nitride film, and said fifth insulating film is a silicon nitride film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com