About: http://webisa.webdatacommons.org/366076323

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the gate insulating film, another insulating film including silicon may be used as a single layer or a laminate structure. (FIG. 7B)
http://www.w3.org/ns/prov#wasQuotedFrom	google.com