About: http://webisa.webdatacommons.org/366088327

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A system including 64 actuators, for example, can be realized by an arrangement of 8 by 8 matrix on a substrate of about 2.5 mm square.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com