About: http://webisa.webdatacommons.org/366088710

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a method for forming the fifth insulating film, a known method such as a CVD method, a coating method, or a printing method is used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com