About: http://webisa.webdatacommons.org/366102388

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a result, the above noted problems in the prior art become even more problematic, especially for devices where F=100 nm and smaller.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com