| http://www.w3.org/ns/prov#value | - A small region 307 (e.g., approximately 10 nm) at the sharp end 188 of the silicon tip 132 is oppositely doped (P or N doped) to the bulk silicon portion 306 and oxidation etched. [0256] Then, the entire tip 132 is lightly overcoated with a conductive material such as doped silicon carbide, aluminum,
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