About: http://webisa.webdatacommons.org/366246721

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1A is a side view of a chamber component 100, such as a face plate or other gas distribution element, having an orifice 102 (e.g., a hole or otherwise shaped opening that extends through the component 100).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com