About: http://webisa.webdatacommons.org/366295984

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2E is a schematic cross sectional view of the embodiment shown in FIG. 2D during dry etch processing of a dielectric layer;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com