About: http://webisa.webdatacommons.org/366324503

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a plan view that schematically shows a beam shape of a laser beam used in the step of manufacturing the semiconductor thin film in the first embodiment of the present invention, and its scan direction.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com