| http://www.w3.org/ns/prov#value | - FIG. 4 is a plan view showing the configuration of the pattern surface of reticle R. Asshown in FIG. 4, the pattern surface of reticle R is formed with a rectangular pattern area 51 on which a transfer pattern is drawn, and a light-shielding zone 52 surrounding the rectangular pattern area 51.
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