About: http://webisa.webdatacommons.org/366490669

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic flow sheet of the various steps used in the method of the invention to provide ultra-thin film capacitors,
http://www.w3.org/ns/prov#wasQuotedFrom	google.com