| http://www.w3.org/ns/prov#value | - In the mirror element 38, the micromirror 31 is formed, for example, with a metal of high reflectivity, or a dielectric multi-layer film, and the whole or part (such as the root, the top, and a middle portion) of the elastic hinge 36 for supporting the micromirror 31 is formed with a metal having a restoring force or a semiconductor material such as Si, etc.
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