About: http://webisa.webdatacommons.org/366739371

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the fabrication equipment 110 includes process chambers, reactors, steppers, etchers, and other tools and instruments associated with the fabrication of manufactured products.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com