About: http://webisa.webdatacommons.org/366860901

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulating film is formed on an entire surface of the semiconductor substrate 21, including the trenches, and is etched back, forming the isolating films 22 of STI structures in the trenches.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com